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Absolute height measurement of specular surfaces with modified active fringe reflection photogrammetry

机译:用改进的有源条纹反射摄影测量法测量镜面的绝对高度

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摘要

Deflectometric methods have existed for more than a decade for slope measurement of specular freeform surfaces through utilization of the deformation of a sample pattern after reflection from a test surface. Usually, these approaches require two-directional fringe patterns to be projected on a LCD screen or ground glass and require slope integration, which leads to some complexity for the whole measuring process. \udThis paper proposes a new mathematical measurement model for measuring topography information of freeform specular surfaces, which integrates a virtual reference specular surface into the method of active fringe reflection delfectometry and presents a straight-forward relation between height and phase. This method only requires one direction of horizontal or vertical sinusoidal fringe patterns to be projected on a LCD screen, resulting in a significant reduction in capture time over established method. Assuming the whole system has been pre-calibrated, during the measurement process, the fringe patterns are captured separately via the virtual reference and detected freeform surfaces by a CCD camera. The reference phase can be solved according to spatial geometrical relation between LCD screen and CCD camera. The captured phases can be unwrapped with a heterodyne technique and optimum frequency selection method. Based on this calculated unwrapped-phase and that proposed mathematical model, absolute height of the inspected surface can be computed. Simulated and experimental results show that this methodology can conveniently calculate topography information for freeform and structured specular surfaces without integration and reconstruction processes.
机译:通过利用从测试表面反射后的样品图案的变形,偏转测量方法已经存在十多年,用于镜面自由曲面的斜率测量。通常,这些方法需要将双向条纹图案投影到LCD屏幕或毛玻璃上,并且需要进行坡度积分,这会导致整个测量过程有些复杂。 \ ud本文提出了一种新的数学测量模型,用于测量自由曲面镜面的形貌信息,该模型将虚拟参考镜面集成到有源条纹反射畸变法中,并给出了高度和相位之间的直接关系。这种方法只需要将一个水平或垂直正弦条纹图案的方向投影到LCD屏幕上,与传统方法相比,可大大减少捕获时间。假设整个系统已经过预先校准,则在测量过程中,条纹图案将通过虚拟参考分别捕获,并由CCD摄像机检测到自由曲面。参考相位可以根据LCD屏幕和CCD摄像机之间的空间几何关系来求解。捕获的相位可以使用外差技术和最佳频率选择方法展开。基于该计算出的展开相位和所提出的数学模型,可以计算出被检查表面的绝对高度。仿真和实验结果表明,该方法可以方便地计算自由形式和结构化镜面的形貌信息,而无需集成和重建过程。

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